Cold Plasma in Materials Fabrication: From Fundamentals to Applications

Processing by plasma-assisted techniques is growing in the production and manufacturing processes of a wide range of industries including automotive, aerospace, biomedicine, and microelectronics. Grill, a researcher at IBM, explains the main parameters and types of plasma, internal reactions and reactions with solid surfaces, generating and diagnosing cold plasmas, and their application in the processing of materials. Annotation copyright Book News, Inc. Portland, Or.