Book Details
Format
Hardcover
Pages
272
Language
English
Published
Jan 1, 1994
Publisher
IEEE
ISBN-10
0780310551
ISBN-13
9780780310551
Description
Processing by plasma-assisted techniques is growing in the production and manufacturing processes of a wide range of industries including automotive, aerospace, biomedicine, and microelectronics. Grill, a researcher at IBM, explains the main parameters and types of plasma, internal reactions and reactions with solid surfaces, generating and diagnosing cold plasmas, and their application in the processing of materials. Annotation copyright Book News, Inc. Portland, Or.