Book Details
Format
eBook
Pages
397
Language
English
Published
Jan 1, 2007
Publisher
Springer
ISBN-10
1281179302
ISBN-13
9781281179302
Description
This book provides a comprehensive monograph on gate stacks in semiconductor technology. It covers the major latest developments and basics and will be useful as a reference work for researchers, engineers and graduate students alike. The reader will get a clear view of what has been done so far, what is the state-of-the-art and which are the main challenges ahead before we come any closer to a viable Ge and III-V MOS technology.