Optical Characterization in Microelectronics Manufacturing

Optical Characterization in Microelectronics Manufacturing

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1994 · English · Paperback
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Description

Covers ellipsometry, infrared spectroscopy, optical microscopy, modulation spectroscopy, photoluminescence & raman scattering. Bibliography.

Book Details

Format Paperback
Pages 34 pages
Language English
Published Jun 1, 1994
Publisher Diane Pub Co
ISBN-10 0788115391
ISBN-13 9780788115394
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